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发明名称
SYSTEM FOR AND METHOD FOR GAS CLUSTER ION BEAM NEUTRALIZATION
摘要
申请公布号
EP1550144(A1)
申请公布日期
2005.07.06
申请号
EP20030749734
申请日期
2003.09.19
申请人
EPION CORPORATION
发明人
MACK, MICHAEL, E.
分类号
C23C16/452;H01J3/14;H01J27/00;H01J37/02;H01J37/08;H01J37/317;(IPC1-7):H01J37/08;C23C14/35
主分类号
C23C16/452
代理机构
代理人
主权项
地址
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