| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide surface reforming electron beam machining equipment which performs and finishes surface reforming machining of a wide region of a metal member efficiently, at high speed, uniformly, and equally. <P>SOLUTION: By generating in a confining magnetic field, glow discharge to be generated having anode plasma and cathode plasma between an annular anode and a wide-area cathode in a low-pressure gas, and moreover applying high negative voltage pulses to the cathode, electron beam pulses 11, 11-2 of wide area which use the plasma as a passage and are not narrowed down are generated, and a work piece 12 is irradiated and machined. A pair of cylindrical beam housing portions 1A, 1A-2 for housing electron beam generating portions are arranged at an interval of an integer N (includes 1) times the effective diameter L of the cross sections of electron beams radiated from the housing portions 1A, 1A-2, with respect to a machining housing 1B in the direction of relative axial movement of a table 27 for putting the work piece 12 on. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
