| 摘要 |
In target shape reconstruction, in order to determine efficiently and quickly the profile of complex targets on a substrate, the various degrees of freedom or variable parameters of the various shapes of which a single profile is made up can be reduced by linking together the variable parameters using simple formulae or by approximating the shape of the overall profile such that it takes in to account the various shapes making up that profile. Fewer parameters gives rise to fewer iterations of calculations on those parameters, which increases the speed of profile reconstruction.
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