| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing quartz vibrator preventing out-of-plane vibration that arises at vibration leg even at the absence of angular velocity because of residues of a side surface of the vibration leg of a quartz vibrator for vibration gyro in wet etching process. <P>SOLUTION: In the method for manufacturing a quartz vibrator for producing a Z-cut quartz plate 100 with the wet etching process, corrosion-proof film patterns 101, 102 for determining an external shape of the quartz vibration piece forming the quartz vibrator, are formed only on the principal front surface in the side of -Z axis, and the principal front surface in the side of +Z axis is entirely covered with a corrosion-proof film 103. When the etching process advances to some degree, the corrosion-proof film in the side of +Z axis is removed and thereafter a part with side surface residues of vibration leg are removed with the wet etching process. <P>COPYRIGHT: (C)2008,JPO&INPIT |
