Apparatus and method for irradiating

摘要

A method irradiates a wafer and an apparatus provides for a wafer to be irradiated. A plurality of radiation emitters emit radiation. A mask permits a portion of the electromagnetic radiation from the plurality of radiation emitters to pass and blocks a further portion of said electromagnetic radiation from passing.

主权项

1. Apparatus for irradiating, said apparatus comprising:
a plurality of radiation emitters arranged along a non-linear path along a common plane and from which electromagnetic radiation is emitted so that the electromagnetic radiation is directed away from the common plane; and a mask which permits a portion of said electromagnetic radiation from said plurality of radiation emitters to pass and which blocks a further portion of said electromagnetic radiation from said plurality of radiation emitters from passing wherein said portion of said electromagnetic radiation is transmitted past said mask along an outer edge of said mask.