发明名称 |
METHOD AND APPARATUS FOR ALIGNING CASSETTE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for aligning a cassette for work-pieces in an automated work-piece handling system.SOLUTION: A method aligns a ring cassette handler to a robot blade in a work-piece handling system. The cassette handler has a support surface for supporting a work-piece cassette having a plurality of slots for carrying work-pieces. The method comprises the steps of: placing a frame on the cassette handler support surface; moving the work-piece carried by the robot blade; and mapping motion of the work-piece carried by a robot frame relative to the frame.SELECTED DRAWING: Figure 5 |
申请公布号 |
JP2016129261(A) |
申请公布日期 |
2016.07.14 |
申请号 |
JP20160052858 |
申请日期 |
2016.03.16 |
申请人 |
APPLIED MATERIALS INC |
发明人 |
SCHAUER RON VERN;LAPPEN ALAN RICK |
分类号 |
H01L21/68;B23Q3/18;B23Q17/24;B65G49/07;H01L21/00;H01L21/673;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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