发明名称 |
CONTINUOUS PROCESS FOR OPTIMIZED LASER INDUCED FORWARD TRANSFER TO CREATE ARBITRARY PATTERNS |
摘要 |
The present disclosure relates to high utilization of donor material in a writing process using Laser-Induced Forward Transfer. Specifically, the technology relates to methods and devices including a target substrate moving relative a workpiece and pulsing a laser beam through the target substrate while the target substrate is moving relative to the workpiece to cause LIFT. The technology further relates to devices and methods including a continuous loop target substrate belt which passes through an exposure station and a regeneration station. |
申请公布号 |
WO2016124708(A1) |
申请公布日期 |
2016.08.11 |
申请号 |
WO2016EP52426 |
申请日期 |
2016.02.04 |
申请人 |
MYCRONIC AB |
发明人 |
SANDSTRÖM, TORBJÖRN;MÅRTENSSON, GUSTAF;ROSLING, MATS |
分类号 |
C23C14/04;B33Y10/00;B33Y30/00;C23C14/24;C23C14/28;C23C14/56 |
主分类号 |
C23C14/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|