发明名称 CONTINUOUS PROCESS FOR OPTIMIZED LASER INDUCED FORWARD TRANSFER TO CREATE ARBITRARY PATTERNS
摘要 The present disclosure relates to high utilization of donor material in a writing process using Laser-Induced Forward Transfer. Specifically, the technology relates to methods and devices including a target substrate moving relative a workpiece and pulsing a laser beam through the target substrate while the target substrate is moving relative to the workpiece to cause LIFT. The technology further relates to devices and methods including a continuous loop target substrate belt which passes through an exposure station and a regeneration station.
申请公布号 WO2016124708(A1) 申请公布日期 2016.08.11
申请号 WO2016EP52426 申请日期 2016.02.04
申请人 MYCRONIC AB 发明人 SANDSTRÖM, TORBJÖRN;MÅRTENSSON, GUSTAF;ROSLING, MATS
分类号 C23C14/04;B33Y10/00;B33Y30/00;C23C14/24;C23C14/28;C23C14/56 主分类号 C23C14/04
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