Apparatus for transferring and manipulating semiconductor components

摘要

An apparatus for picking and placing or for picking and transferring or for picking, placing and pressing semiconductor components (10) is disclosed. The apparatus (10) comprises a motor for generating power to rotate a turret (6) which holds a plurality of pick up heads (7), a plurality of pressers (8), wherein each of said pressers (8) is a voice coil assembly (3) which consist of voice coil actuator assemblies (31), at least one stationary frame (1, 2) to secure said voice coil assemblies (3) and a controller means to control the direction and magnitude of displacement of said voice coil actuator assemblies (31). When current flows into voice coil in said voice coil actuator assembly (31), electromagnetic force is generated in vertical direction, forcing said actuators to press said pick up heads (7) located directly below said actuators at a particular moment, which in turn reaches to and press on wafers or semiconductor components located below said pick up heads. The pressing force, speed and direction of each actuator can be controlled individually. Furthermore, this invention includes safety measures wherein a real time actuator position feedback system is used to confirm the displacement of said actuators and an urging device (35) is used to return the actuators back to their original position in the event of power outage.

主权项

1. An apparatus for picking and placing or for picking and transferring or for picking, placing and pressing semiconductor components (10) comprising:
a motor in a housing (5) and a rotor shaft extending there out, said rotor shaft oriented vertically downward; a turret (6) with a plurality of spaced apart pick up heads (7) mounted thereon, said turret (6) mounted on said rotor shaft with its vertical axis coaxial with vertical axis of said rotor shaft and rotatable horizontally about the axis of said rotor shaft; a first stationary horizontal frame (1) located vertically above said turret (6); a plurality of spaced apart pressers (8) securely and detachably mounted onto said first stationary horizontal frame (1); and a controller means electrically connected to each of said pressers (8) to control the direction and magnitude of displacement of said pressers (8), wherein each of said pressers (8) is a voice coil assembly (3) comprising a pair of voice coil magnet plates (33) mounted on a skeletal frame (32) with an actuator assembly (31) slidably movable between said pair of voice coil magnet plates (33) in a direction parallel to the axis of said rotor shaft to provide pressing force onto said pick up head (7) located below said actuator assembly (31) at that moment in time and the direction and magnitude of displacement of said actuator assembly (31) is controlled by said controller means.