| 发明名称 | Electronic device | ||
| 摘要 | An electronic device includes a substrate, an electrode formed on the substrate, and a movable portion provided above the electrode, the movable portion being elastically deformable, in which the movable potion includes a shape memory alloy film. | ||
| 申请公布号 | US9488162(B2) | 申请公布日期 | 2016.11.08 |
| 申请号 | US201314022604 | 申请日期 | 2013.09.10 |
| 申请人 | FUJITSU LIMITED | 发明人 | Toyoda Osamu |
| 分类号 | H01L41/09;F03G7/06;H01G5/16;B81B3/00;C25D7/00;H02N1/00;H01L41/318;H01H59/00;H01H1/00 | 主分类号 | H01L41/09 |
| 代理机构 | Kratz, Quintos & Hanson, LLP | 代理人 | Kratz, Quintos & Hanson, LLP |
| 主权项 | 1. An electronic device comprising: a substrate; a first electrode formed on the substrate; and a movable portion provided above the first electrode, the movable portion being elastically deformable, wherein the movable portion includes a shape memory alloy film, a diffusion prevention film and an oxidation prevention film, and the shape memory alloy film is held between the diffusion prevention film and the oxidation prevention film. | ||
| 地址 | Kawasaki JP | ||