ENERGY CONVERSION DEVICE AND METHOD OF FORMING THE SAME

摘要

Various embodiments may provide a method of forming an energy conversion device. The method may include forming an electrolyte layer on the first surface of the semiconductor substrate. The method may also include forming a cavity on the second surface of the semiconductor substrate using a deep reactive ion etch. The method may further include enlarging said cavity by carrying out one or more wet etches so that the enlarged cavity is at least partially defined by a vertical arrangement comprising a first lateral cavity surface of the semiconductor substrate extending substantially along a first direction, and a second lateral cavity surface of the semiconductor substrate adjoining the first lateral cavity surface. The method may include forming a first electrode on a first surface of the electrolyte layer, and forming a second electrode on a second surface of the electrolyte layer.