发明名称 |
Method for operating a pulsed arc evaporation source and vacuum process system comprising said pulsed arc evaporation source |
摘要 |
A vacuum process system for surface-treating work pieces uses an arc evaporation source. The system has a first electrode connected to a DC power source and a second electrode, disposed separately from the arc evaporation source. The two electrodes are operated while being connected to a single pulsed power supply.
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申请公布号 |
US7943017(B2) |
申请公布日期 |
2011.05.17 |
申请号 |
US20060908542 |
申请日期 |
2006.03.01 |
申请人 |
OERLIKON TRADING AG, TRUBBACH |
发明人 |
RAMM JUERGEN;WIDRIG BENO;LENDI DANIEL;DERFLINGER VOLKER;REITER ANDREAS |
分类号 |
C23C14/00 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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