ELECTRODE SUBSTRATE OF CULTIVATING NERVE NET

摘要

PURPOSE: An electrode substrate of cultivating a nerve net is provided to simultaneously observe or stimulate several hundreds of nerve cells by forming an electrode array of the desired number and pattern on a substrate and cultivating a nerve circuit net on the semiconductor substrate. CONSTITUTION: A nerve cell is put on a second insulation layer(24). A conductor layer(23) stimulates the nerve cell or forms a connection unit for connecting an electrode unit with an outside circuit. First and second insulation layers(22,24) prevent ions or water from permeating into a substrate in a cultivation atmosphere on the substrate. A nitride film efficiently prevents ion permeation. An oxidation film has a small amount of pinhole so that the nitride film is prevented from being oxidized in the cultivation atmosphere.