| 摘要 |
Aerostatic airbearing, comprising a counter body (2) having a counter surface (21) and a bearing body (1), having a bearing surface (11) arranged opposing the counter surface (21). In the bearing body (1) are formed a nozzle channel (12) ending at the bearing surface (11) and being connected to a pressure source supplying a feed pressure, and a micro channel structure (13) which extends along the bearing surface (11), is open towards the bearing surface (11) and runs into the nozzle channel (12). The airbearing has a static characteristic curve of the carrying force as a function of the gap width between the bearing surface (11) and the counter surface (21), which curve is defined by the structures of the bearing body (1) and of the counter body (2) and by the feed pressure. The micro channel structure (13) extends, in at least one direction of the bearing surface (11), over the most part of the bearing surface (11). The cross sections of the micro channel structure (13) are such small, that, at operating states of the characteristic curve, at which the carrying force is less than 50% of the maximum carrying capacity, the overall volume of channels of the micro channel structure (13) is less then 10%, preferably less than 7.5%, further preferably less than 6% of the volume between the bearing surface (11) and the counter surface (21). |
