| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide manufacturing method capable of eliminating the necessity of using an expensive equipment such as an RIE, reducing the frequency of heating processes for resin curing, shortening the manufacturing process, and sharply improving the throughput. SOLUTION: A polymer constituting a lower clad layer a2 or an organic solvent solution to be a precursor of the polymer is applied to the surface of a substrate b2 and prebaked at a temperature of 60 to 200 deg.C, a polymer constituting a core part c2 or an organic solvent solution to be a precursor of the polymer is applied and prebaked at a temperature of 60 to 200 deg.C and a resist e2 is applied to the surface of the core layer c2 and prebaked. Then, a pattern f2 is exposed, the resist layer e2, the core layer c2 and the lower clad layer a2 are simultaneously developed by a developer and the remaining resist layer e2 is peeled and removed to form a projected part consisting of the core layer (core part) c2 and the lower clad layer a2. |
