发明名称 OPTICAL PROBE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To solve problems that surplus stray light is detected when a detector having a large photoreceiving face compared with a size of a calescence point is used, that matching for an optical axis is required when a detector having a small photoreceiving face of about the calescence point is used, and that plural photodetectors are required to obtain plural optical informations, in photodetection in an optical probe microscope. SOLUTION: A two-dimensional image is acquired in a real time using a two-dimensional image sensor, and signal intensity in an optional detection area in the two-dimensional image is obtained by an image signal processing means. The plurality of pieces of information are imaged on the two-dimensional image sensor to assign the detection areas plurally.
申请公布号 JP2002277375(A) 申请公布日期 2002.09.25
申请号 JP20010189784 申请日期 2001.06.22
申请人 SEIKO INSTRUMENTS INC 发明人 MURAMATSU HIROSHI
分类号 G01B11/30;G01B11/24;G01Q30/04;G01Q60/18;G01Q60/22;(IPC1-7):G01N13/14 主分类号 G01B11/30
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