发明名称 |
XY stage, head carriage and tester of magnetic head or magnetic disk |
摘要 |
An XY stage includes a movable frame having a rectangular space inside thereof and movable on a reference base along one of X and Y axes, a first drive source provided in the reference base for moving the movable frame, a rectangular movable base mounted in the rectangular space of the movable frame, which is movable on the reference base along the other of the X and Y axes and stopped on the reference base, and a second drive source provided in the movable frame, for moving the movable base.
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申请公布号 |
US2004183527(A1) |
申请公布日期 |
2004.09.23 |
申请号 |
US20040803904 |
申请日期 |
2004.03.19 |
申请人 |
MORI KYOICHI;YAMASAKI FUJIO;SUGIYAMA TOSHINORI |
发明人 |
MORI KYOICHI;YAMASAKI FUJIO;SUGIYAMA TOSHINORI |
分类号 |
F16C32/00;F16C29/04;F16C32/06;G11B5/00;G11B5/012;G11B5/455;(IPC1-7):G11B5/455 |
主分类号 |
F16C32/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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