Method of forming pattern, system for calculating resist coating distribution and program for calculating the same

摘要

In one embodiment, a method of forming a resist pattern on a substrate is provided. Information of a template pattern formed on a template based on template pattern data is obtained. A resist coating distribution is set based on the information of the template pattern. A resist is formed on a substrate based on the resist coating distribution. The template is brought into contact with the resist formed on the substrate so that the resist is filled into the template pattern formed on the template. The filled resist is cured. The template is separated from the cured resist so that a resist pattern is formed on the substrate.

主权项

1. An imprint method of forming a pattern, comprising:
obtaining information of a template pattern which is actually formed on a template for use in imprinting and measured by a measurement device, the template being made based on design pattern data, the information of the template pattern including at least one of density, dimension, position, sidewall tilt angle or depth of the template pattern; obtaining information related to a difference between the information of the measured template pattern and information of a design pattern of the design pattern data; modifying the design pattern data based on the information related to the difference; setting a resist coating distribution based on the information of the modified design pattern data; coating a resist on a substrate based on the resist coating distribution; contacting the template onto the resist coated on the substrate and filling the resist into the template pattern; curing the resist filled in the template pattern; and separating the template from the cured resist.