| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a substrate for surface enhanced Raman spectroscopy, capable of stationarily enhancing optical intensity of light emitted from molecules distributed over the whole surface of the substrate.SOLUTION: A substrate for surface enhanced Raman spectroscopy is a support structure having: a support body 3 including an upper side surface 4; and at least one fine structure pattern 5. The fine structure pattern includes has an upper part and a side wall, and the side wall extends in a direction crossing a direction of the upper side surface. The substrate includes a multilayer part arranged on the side wall of the fine structure pattern. The multilayer part contains at least two pillar layers 13. The at least two pillar layers are separated from each other through an intermediate layer 14. Since each intermediate layer has an end part retreating with respect to an end part 19 of each adjacent pillar layer, the end parts of two continuous pillar layers form a pin to be separated through a cavity 20, and the end part of the pillar layer is covered with a metal layer 40.SELECTED DRAWING: Figure 1g |
