PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS

摘要

In a pattern forming method of an embodiment, a template pattern formed on a front side of a template is brought into contact with resist placed on a substrate. Moreover, in the pattern forming method, rear pressure being an ambient pressure on a back side of the template is adjusted to a second pressure. Moreover, in the pattern forming method, the resist is filled in the template pattern under the second pressure to be cured.

主权项

1. A pattern forming method comprising:
bringing a template pattern formed on a front side of a template into contact with resist placed on a substrate; adjusting, to a first pressure, pressure inside an apparatus on which the template is placed; adjusting, to a second pressure, rear pressure being ambient pressure on a back side of the template, the second pressure being lower than the first pressure; filling the resist in the template pattern under the second pressure; and curing the resist.