| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure a small amount of a gas component generated by destructing an inspection target.SOLUTION: When measuring an impurity component in argon gas by an atmospheric pressure ionization mass spectrometer 28, all ions are not scanned but only M/z=40(Ar) and M/z=80(Ar) of a parent ion and a necessary impurity component to be measured are scanned, relative ion intensity is found out by dividing ion intensity of the impurity component to be measured by the ion intensity of the parent ion to be a denominator, and an impurity concentration is calculated by multiplying the relative ion intensity of the impurity component to be measured by a concentration conversion factor. Since all scanning is not performed, a measurement interval of once per 60 sec is improved to a measurement interval of once per 1 sec. |
