DEVICE AND METHOD FOR TREATING, STORING AND LOADING SUPPORTS FOR DISK-SHAPED ARTICLES

摘要

The invention relates to a device (1) for treating, storing and loading supports for disk-shaped articles, such as semiconductor wafers or CDs, comprising at least one cleaning unit (18) and at least one storage (20) for supports (11, 11') for the disk-shaped articles as well as at least one sorting unit (16) for the disk-shaped articles. The cleaning unit (18), the storage (20) and the sorting device (16) form an integral part of the device (1) and are operated by a common control.