发明名称 Semiconductor memory device
摘要 A memory cell of an SRAM has a full CMOS cell structure having successively aligned three wells of different conductivity types, and includes first and second contact holes extending from positions on first and second gates to positions above an impurity region of a predetermined MOS transistor, and formed in a self-aligned fashion with respect to the first and second gates, and first and second local interconnections formed in the contact holes, respectively.
申请公布号 US2002093111(A1) 申请公布日期 2002.07.18
申请号 US20010906146 申请日期 2001.07.17
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 OHBAYASHI SHIGEKI
分类号 H01L21/768;H01L21/8244;H01L27/10;H01L27/105;H01L27/11;H01L27/12;(IPC1-7):H01L27/11 主分类号 H01L21/768
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