发明名称 Wafer structure with electroless plating metal connecting layer and method for fabricating the same
摘要 A wafer structure with an electroless plating metal connecting layer and a method for fabricating the same are proposed. A wafer has an active surface and an inactive surface opposite to the active surface. The active surface has a plurality of electrical connecting pads formed thereon. An insulating protective layer is formed on the active surface of the wafer and a plurality of openings are formed in the insulating protective layer to correspond to the electrical connecting pads, so that the electrical connecting pads are exposed. A plurality of electroless plating metal connecting layers are formed on the electrical connecting pads that are exposed through the openings, by electroless plating. Therefore, the electrical connecting process of the wafer is simplified and easily implemented. As a result, the production cost is reduced, the yield is raised, and mass production of high quality is ensured simultaneously.
申请公布号 US2007087547(A1) 申请公布日期 2007.04.19
申请号 US20060509876 申请日期 2006.08.24
申请人 发明人 CHEN SHANG W.;ZENG ZHAO C.;LIEN CHUNG C.;HSU SHIH P.
分类号 H01L21/44;H01L23/48;H01L23/52;H01L29/40 主分类号 H01L21/44
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