| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device of a coating fluid which is highly productive and can easily apply the coating fluid with high quality level because the mounting and removal of a heavy and continuous length spray head which is extremely difficult to handle, can be performed in a short time and without causing damage etc. and further, positioning of the spray head as specified can be achieved with high precision and successful reproducibility. SOLUTION: This coating device of a coating fluid comprises (1) a table for immobilizing a substrate, (2) the spray head for applying the coating fluid to the substrate, (3) a spray head holder for supporting the spray head opposite to the substrate and (4) a moving means for relatively moving the table and the spray head holder three-dimensionally. The spray head holder has a support part for supporting the spray head from below and a guide member for regulating the longitudinal or width position of the spray head when introducing the spray head through the interior of the spray head holder from above. The spray head has a member to be guided which comes into contact with the guide member when introducing the spray head into the interior of the spray head holder from above the latter. COPYRIGHT: (C)2009,JPO&INPIT
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