Recording measurements by sensors for a carrier head

摘要

A pressure control assembly for a carrier head of a polishing apparatus includes a pressure supply line configured to fluidically connect to a chamber of a carrier head, a sensor to responsive to pressure in the chamber and configured to generate a signal representative of the pressure, and a pneumatic control unit configured to receive the signal, to control a pressure applied to the pressure supply line, and to record the signal in a non-transitory storage media of a storage device removably attached to the pneumatic control unit.

主权项

1. A pressure control assembly for a carrier head of a polishing apparatus, comprising:
a support movable relative to a platen; a pressure supply line configured to fluidically connect to a chamber of a carrier head mounted on the support; a sensor to responsive to pressure in the chamber and configured to generate a signal representative of the pressure; a pneumatic control unit including a data port configured to detachably receive a storage device, the pneumatic control unit and data port mounted on the support that is movable relative to the platen, the pneumatic control unit configured to receive the signal, to control a pressure applied to the pressure supply line, and to record the signal in a non-transitory persistent storage media of a storage device removably attached to the pneumatic control unit, and a computer spaced apart from the support and electronically coupled to the pneumatic control unit, the computer configured to store a desired pressure and send a command to the pneumatic control unit to cause the pneumatic control unit to apply the desired pressure to the pressure supply line.