| 主权项 |
1. A self-gettering differential pump for a molecular beam epitaxy system, comprising:
a collimator having a length greater than its diameter, wherein the ratio between the length and the diameter is about two to seven, wherein the collimator includes a first end and a second end, and wherein the first end is positioned in proximity to the vacuum chamber opening; and a port positioned in proximity to the second end of the collimator, the port comprising an effusion cell that, when activated, delivers a reactant through the collimator to the vacuum chamber opening, wherein the reactant comprised on or more of Sr, Mg, Ca, Ba, Ti and Zn; wherein the reactant also serves as an oxygen gettering agent on the inner sidewall of the collimator. |
