Sputtering target, method of fabricating the same, and method of fabricating an organic light emitting display apparatus

摘要

A method of fabricating a sputtering target is provided. The method includes preparing a first powder material, wherein the first powder material includes tin oxide; preparing a mixture by mixing the first powder material and a second powder material, wherein the second powder material includes carbon; and fabricating the sputtering target by compressing and sintering the mixture simultaneously in a reducing atmosphere.

主权项

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming an organic light-emitting unit on a substrate, wherein the organic light-emitting unit includes a lower electrode, an organic light-emitting layer, and an upper electrode; and forming a thin film encapsulation layer on the organic light-emitting unit by a sputtering process using a sputtering target, wherein the sputtering target comprises a first powder material including tin oxide and a second powder material including carbon, wherein the first powder material and the second powder material are homogeneously mixed in the sputtering target, and wherein the sputtering target is formed from a preliminary sputtering target that is rich of tin cations, wherein the carbon included in the second powder material is oxidized and depleted during the sputtering process, and wherein the thin film encapsulation layer includes the first powder material, and the carbon included in the second powder material is omitted from the thin film encapsulation layer.