| 摘要 |
PURPOSE: An array testing apparatus is provided to efficiently detect a defect of a large sized substrate while making a testing module horizontally move along an X axial direction or a Y axial direction. CONSTITUTION: A stage(15) mounts a substrate(S). A frame(10) supports the stage. A supporter(20) is installed at an upper part of the frame while moving along the Y axial direction. A testing module(30) is installed at the supporter while moving along the X axial direction. The testing module includes a light source and a modulator. The modulator is made of a reflecting layer, installed in contact with the substrate, and a photoelectric material layer, converting light intensity according to a size of an electric field generated between itself and the substrate. |
