发明名称 レーザーを利用する半導体チップ除去装置
摘要 An apparatus for removing a semiconductor chip from a board may include: a laser configured to irradiate the board with a laser beam to heat bumps mounting the semiconductor chip on the board; a picker configured to separate the semiconductor chip from the board; a vacuum portion configured to provide a vacuum to the picker; and an intake. If solder pillars, that are residues of the bumps, are melted by the laser beam, the intake removes the solder pillars using the vacuum provided from the vacuum portion. An apparatus for removing a semiconductor chip from a board may include: a stage configured to support the board on which the semiconductor chip is mounted by bumps; a laser configured to irradiate the board with a laser beam to heat the bumps mounting the semiconductor chip on the board; and a picker configured to separate the semiconductor chip from the board.
申请公布号 JP6012299(B2) 申请公布日期 2016.10.25
申请号 JP20120151771 申请日期 2012.07.05
申请人 三星電子株式会社Samsung Electronics Co.,Ltd. 发明人 朴 在 用;高 濬 泳;申 和 秀;鄭 基 賢
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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