| 摘要 |
The invention disclosed is methods, apparatus, and systems of a horizontal modular heater. Whereas the prior art, being heater of a single zone and singular structure, may not be able to provide the desired temperature profile nor efficient downtime during parts breakage is accordingly insufficient for the needs of the industry. The present invention then may be a furnace used in semiconductor manufacturing, of which may be a horizontal heater with multiple modules, of which may be connected in an ingenious method or structure to limit leakage and of which improves efficiency over previous heater designs heaters in the art. |
| 主权项 |
1. A heater comprising:
a layered housing structure with an interior heater recess, and wherein:
the housing structure includes at least one layer of insulating blocks, wherein the blocks:
insulate the interior recess and heating elements from the ambient, positioned to at least one adjacent block to create a seamless façade,are surrounded by an additional façade such as in a shiplap design, wherein the façade surrounds the blocks to create a seamless structure wherein heat cannot escape between the blocks;at least one heating elements are mounted in the interior recess, wherein:
the heating elements are disparate into one or more elements, andthe heating elements are coupled to at least one interior layer block;the heater is divided into at least one zone, wherein:
the at least one zone is any plurality of zones,the heater elements individually span a single zone,the blocks individually span a single zone, and wherein temperature is controlled by zone, and wherein the zones are disparate connected sections. |
