发明名称 POSITIONING STAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To downsize or to remove a battery mounted on a movable stage body, and to supply an electric power to the movable stage body at an arbitrary position or at an arbitrary timing in noncontact manner without using an electric cable. SOLUTION: A plurality of electric power transmission coils for supplying the electric power are burried and arranged in a base structure, and a means for sequentially switching over the electric power transmission coils is provided in accordance with the position at the stage provided with a power receiving coil for obtaining an electric power in a noncontact manner with an alternating-current magnetic field applied. The plurality of electric power receiving coils on the stage are arranged with their phase lag to the electric power transmission coil, and the frequency of the alternating-current magnetic field is set to the resonance frequency determined by a mutual inductance and a load between the electric power transmission coil and the electric power receiving coil. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005209997(A) 申请公布日期 2005.08.04
申请号 JP20040016857 申请日期 2004.01.26
申请人 CANON INC 发明人 OISHI SHINJI
分类号 H01L21/027;G03F7/20;G03F9/00;H01L21/68;(IPC1-7):H01L21/027 主分类号 H01L21/027
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