| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment equipment which can easily introduce a plurality of FOUPs (front-opening unified pod) on an open table without causing a trouble in connection with an inside of the equipment. SOLUTION: The open table 3 includes a plurality of longitudinally moving means 31 on which a plurality of FOUPs 51 are mounted in a longitudinal locating posture and in a positioning state respectively and are arranged sideways along the substrate treatment equipment 1, a transversely moving means 32 which slideably supports each longitudinally means 31 in the orthogonal direction to the sideways arranged direction and moves the plurality of longitudinal means 31 in the arranged direction as one unit, and a pod pressing means 33 which closely touches each FOUPs 51 facing on outlet/inlet 4 to the outlet/inlet 4 through the longitudinally moving means 31. COPYRIGHT: (C)2007,JPO&INPIT
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