发明名称 Fabrication of nanowires and nanodevices
摘要 Methods of fabricating nanowire structures and nanodevices are provided. The methods involve photolithographically depositing a nucleation center on a crystalline surface of a substrate, generating a nanoscale seed from the nucleation center, and epitaxially growing a nanowire across at least a portion of the crystalline surface starting at a nucleation site where the nanoscale seed is located.
申请公布号 US7968433(B2) 申请公布日期 2011.06.28
申请号 US20080247617 申请日期 2008.10.08
申请人 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY 发明人 NIKOOBAKHT BABAK
分类号 H01L21/20 主分类号 H01L21/20
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