发明名称 SHEET-LIKE MATERIAL CONVEYING DEVICE
摘要 <p>A sheet-like material conveying device (10) including an air table unit (14) that has an air table (22) for supporting a glass substrate (12) by supplying air to the lower side of the glass substrate (12) and also has fan devices (24) for supplying positive pressure air to the air table (22). The air table unit (14) is elongate in the conveyance direction and has a fan device (24) placed for each length of the table unit, with each length equivalent to about three to ten times the width of the air table unit (14). Each fan unit (24) is constructed from a box-like receiving section (24A) provided connected to the lower side of the air table (22) and a fan (28) placed inside the receiving section (24A).</p>
申请公布号 WO2008044706(A1) 申请公布日期 2008.04.17
申请号 WO2007JP69751 申请日期 2007.10.10
申请人 YUMIBA, SETSUJI;OGURI, TSUTOMU;TORIYAMA, NORIYUKI;NIHON SEKKEI KOGYO CO., LTD.;NAGURA, NORIYUKI 发明人 NAGURA, NORIYUKI;YUMIBA, SETSUJI;OGURI, TSUTOMU;TORIYAMA, NORIYUKI
分类号 B65G49/06;B65G51/02;H01L21/677 主分类号 B65G49/06
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