PROBE DISPLACEMENT MEASURING DEVICE, IONIZATION DEVICE INCLUDING THE SAME, MASS SPECTROMETER, AND INFORMATION ACQUISITION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a probe displacement measuring device capable of measuring a displacement of a probe that is larger than before.SOLUTION: A probe displacement measuring device 1 includes: a cantilever-like probe 11; light irradiation means 12 for irradiating the probe 11 with light; a light receiving element 14 irradiated by the light irradiation means 12 and receiving reflection light 105 reflected on the surface of the probe 11 as a spot; and, further, light quantity changing means for changing a light quantity of a spot of the reflection light 105 received by the light receiving element 14 in a displacement direction of the spot of the reflection light 105 on the light receiving element 14.SELECTED DRAWING: Figure 1