发明名称 THERMOELECTRIC SENSOR AND PRODUCTION METHOD
摘要 The invention relates to a thermoelectric sensor (10) for measuring thermoelectric voltages, comprising an irradiation side (O) and an assembly side (U). The sensor comprises a plurality of thermoelements with measurement transitions (M) which are formed by the transition of a first metal layer (1) and a second metal layer (2) into another metal layer, and the two metal layers (1, 2) sandwich an electrically insulating matrix layer (3). The thermoelectric sensor is to be producible in a simple and inexpensive manner and should be robustly protected against laser beams. This is achieved in that a plurality of first and second blind holes (4, 4') are arranged so as to completely cross the second metal layer (2) and the matrix layer (3) from the assembly side (U). The inner walls (40) of the first blind holes (4) are covered by a third metal layer (5) and a fourth metal layer (6), and the inner walls (40') of the second blind holes (4') are covered by the fourth metal layer (6), thus forming a thermoelectric sensor (10) with a body which is closed towards the irradiation side (O).
申请公布号 WO2016128247(A1) 申请公布日期 2016.08.18
申请号 WO2016EP52131 申请日期 2016.02.02
申请人 GREENTEG AG 发明人 SCHWYTER, Etienne;ZAHNER, Michele;DRÖSCHER, Susanne;HELBLING, Thomas
分类号 G01K17/00 主分类号 G01K17/00
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