发明名称 MAGNETIC SENSOR AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a magnetic sensor which is obtained by placing a magnetic focusing plate having high magnetic permeability and small magnetic coercive force, with little positional variation, onto a substrate having Hall elements and circuitry formed thereon in a manner to minimize an increase in number of work steps and offset voltage, and to provide a manufacturing method therefor.SOLUTION: A magnetic sensor and a manufacturing method therefor are disclosed, the manufacturing method involving; forming a magnetic focusing plate folder which is a recessed pattern having the same shape and size as a magnetic focusing plate on a package die pad upon which a semiconductor substrate with Hall elements, circuitry and the like is to be placed; inserting into the magnetic focusing plate folder the magnetic focusing plate produced in a step separate from a step for producing the semiconductor substrate having the Hall elements, circuitry and the like formed thereon; and placing thereon a back surface of the semiconductor substrate with the Hall elements, circuitry and the like.SELECTED DRAWING: Figure 1
申请公布号 JP2016164549(A) 申请公布日期 2016.09.08
申请号 JP20150252369 申请日期 2015.12.24
申请人 SII SEMICONDUCTOR CORP 发明人 TOBIOKA TAKAAKI;EBIHARA MIKA
分类号 G01R33/02;G01R33/07;H01L43/04;H01L43/06 主分类号 G01R33/02
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