Optical scanner, actuator, image display device, and head-mounted display

摘要

An optical scanner includes: a movable portion that is provided with a light reflection portion and is swingable around a first axis; a frame body portion that is swingable around a second axis; a first shaft portion that connects the movable portion and the frame body portion; a fixed portion; a second shaft portion that connects the frame body portion and the fixed portion; a strain detection element that is disposed in the second shaft portion to detect deformation of the second shaft portion; a first signal processing portion to which a detection signal of the strain detection element is input and that outputs a signal based on bending deformation of the second shaft portion; and a second signal processing portion to which a detection signal of the strain detection element is input and that outputs a signal based on torsional deformation of the second shaft portion.

主权项

1. An optical scanner comprising:
a movable portion that is provided with a light-reflective light reflection portion and is swingable around a first axis; a frame body portion that is swingable around a second axis that crosses the first axis; a first shaft portion that connects the movable portion and the frame body portion; a fixed portion; a second shaft portion that connects the frame body portion and the fixed portion; a strain detection element that is disposed in the second shaft portion to detect deformation of the second shaft portion; a first signal processing portion to which a detection signal of the strain detection element is input and that outputs a signal based on bending deformation of the second shaft portion; and a second signal processing portion to which a detection signal of the strain detection element is input and that outputs a signal based on torsional deformation of the second shaft portion, wherein a behavior of the movable portion around the first axis is detected based on the signal output from the first signal processing portion, and wherein a ratio between an amplitude at a resonance frequency related to the swinging of the movable portion around the first axis and an amplitude at a resonance frequency related to the swinging of the frame body portion around the first axis is used to estimate the behavior of the movable portion around the first axis based on the signal output from the first signal processing portion.