WAFER ON WAFER STACK METHOD OF FORMING AND METHOD OF USING THE SAME

摘要

A method of forming a wafer on wafer (WOW) stack includes forming a predetermined array of connecting elements on a surface of a first wafer, the first wafer including dies of a first type. The dies of the first type have a first functionality. The method further includes bonding a second wafer to the first wafer using the predetermined array of connecting elements, the second wafer including dies of a second type. The dies of the second type have a separate functionality different from the first functionality. Bonding the second wafer to the first wafer comprises bonding an integer number of dies of the second type to a corresponding die of the first type. A total area of the dies of the second type bonded to the corresponding die of the first type is less than or equal to an area of the corresponding die of the first type.

主权项

1. A method of forming a wafer on wafer (WOW) stack, the method comprising:
forming a predetermined array of connecting elements on a surface of a first wafer, the first wafer including dies of a first type, wherein the dies of the first type have a first functionality; and bonding a second wafer to the first wafer using the predetermined array of connecting elements, the second wafer including dies of a second type, wherein the dies of the second type have a separate functionality different from the first functionality, wherein bonding the second wafer to the first wafer comprises bonding an integer number of dies of the second type to a corresponding die of the first type, and a total area of the dies of the second type bonded to the corresponding die of the first type is less than or equal to an area of the corresponding die of the first type.