| 发明名称 |
APPARATUS FOR TREATING SUBSTRATE AND MODULE INCLUDING THE SAME |
| 摘要 |
<p>PURPOSE: A board processing module is provided to increase the utilization ratio of a board processing apparatus by taking in or out a susceptor where a plurality of boards are loaded. CONSTITUTION: A board processing module(100) includes the first board processing device(110a), the second board processing device(110b) and a board carriage part(180). The board carriage part takes in a susceptor with plural boards loaded to the board processing devices in order to perform a board processing or takes out the susceptor from the board processing devices. The board processing devices perform the board processing work including a heat treatment process. A fan filter unit is installed at an upper part of the board carriage part in order to clean an internal space of the board carriage part where the susceptor moves.</p> |
| 申请公布号 |
KR101049897(B1) |
申请公布日期 |
2011.07.15 |
| 申请号 |
KR20100108241 |
申请日期 |
2010.11.02 |
| 申请人 |
YEST CO., LTD. |
发明人 |
SI, SUNG SU;KIM, SANG DOO |
| 分类号 |
H01L21/683;H01L21/673;H01L21/677 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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