发明名称 |
Test handler temperature monitoring system |
摘要 |
The invention provides a temperature monitoring system for a semiconductor test handler. A preparation stage brings a test device to a predetermined temperature for testing at a test platform at said predetermined temperature. At least one radiation sensor, such as a thermopile device, is employed in the test handler for detecting a surface temperature of the test device by measuring radiation emitted from the test device.
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申请公布号 |
US2004184508(A1) |
申请公布日期 |
2004.09.23 |
申请号 |
US20030395401 |
申请日期 |
2003.03.21 |
申请人 |
ASM ASSEMBLY AUTOMATION LTD. |
发明人 |
TSUI CHING MAN STANLEY;WONG SAI KIT;YIP SHING KAI |
分类号 |
G01J5/00;G01R1/04;G01R31/28;(IPC1-7):G01J5/00;G01K7/00 |
主分类号 |
G01J5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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