发明名称 SURFACE EMITTING ELEMENT ARRAY, MANUFACTURING METHOD THEREOF, MICRO LENS MANUFACTURING APPARATUS, AND CONTROL METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a surface emitting element array for reducing the characteristic difference between chips, and to provide a method for manufacturing the surface emitting element array. SOLUTION: The method for manufacturing the surface emitting element array includes the formation of a plurality of surface emitting elements arrayed on a substrate, and the formation of a micro lens at the upper portion of the emission port of each surface emitting element. The solution of the precursor of a curing resin, having a prescribed amount of light transmittance to each surface emitting element is dripped, prescribed optical characteristics are measured after the precursor is cured, the solution of the precursor is additionally dripped so that the optical characteristics are within a set range to the surface emitting element in which the optical characteristics are outside a given set range, and then the additionally dripped precursor is cured, thus forming a micro lens. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005209716(A) 申请公布日期 2005.08.04
申请号 JP20040012114 申请日期 2004.01.20
申请人 SEIKO EPSON CORP 发明人 KITO SATOSHI
分类号 H01S5/026;H01S5/183;H01S5/40;(IPC1-7):H01S5/026 主分类号 H01S5/026
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