| 摘要 |
PROBLEM TO BE SOLVED: To provide means which uses cleaning liquid after using is made to recrystallize by making into a cleaning liquid carbonic acid alkylene solution which is a mixed solution of an organic film, such as a resist film of substrate top for semiconductors, or substrate superiors for a liquid crystal, a propylene carbonate solution, and are reproduced. SOLUTION: In the means for recrystallizing the ethylene carbonate crystal of high grade from the cleaning liquid of used ethylene carbonate solution or a carbonic acid alkylene solution, one side is set as a cooling unit, and the other is set as a heating part, thereby reproducing the ethylene carbonate crystal of high grade by making another side into a heating part. COPYRIGHT: (C)2006,JPO&NCIPI
|
