| 摘要 |
An air pressure sensor capable of measuring air pressure highly accurately with a simple configuration is provided. The sensor includes: a sealed case with a sealed space formed therein; a first thin plate member which constitutes at least a part of the wall of the sealed case and deforms to allow the capacity of the sealed space to vary corresponding to changes in the outside air pressure; a first PZT which contacts the first thin plate member to thereby detect the natural frequency thereof; and a second thin plate member which has the same vibration characteristics as those of the first thin plate member and is provided outside the sealed case while contacting it; and a second PZT which has the same temperature characteristics as those of the first PZT and contacts the second thin plate member to thereby detect the natural frequency thereof. |
