| 摘要 |
The invention relates to a device for producing high power microwave plas ma. Said device comprises at least one microwave supply (1, 2, 4) that is su rrounded by at least one dielectric tube. A dielectric fluid flows through t he area between the microwave supply and the outer dielectric tube, said die lectric fluid having a small dielectric loss factor tan .delta. in the regio n of between 10-2 to 10-7. At least the outer dielectric tube of the above m entioned device is cooled by a fluid.
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