| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential pressure flowmeter that stably measures very small flow rates without causing such a problem as the blockage, and at the same time, is reduced in manufacturing cost. SOLUTION: This differential pressure flowmeter has: a capillary 5 through which a liquid F is made to flow; pressure sensors 3, 4 which measure the difference between the pressure P<SB>1</SB>and P<SB>2</SB>at both ends of the capillary 5; and an arithmetic processing section 6 which finds the flow rate V of the liquid F from the measured value of the pressure difference (P<SB>1</SB>-P<SB>2</SB>). COPYRIGHT: (C)2009,JPO&INPIT
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