| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device which holds an object to be treated composed of members differing in heat resistance, and to provide a substrate treating device and a substrate treating method that separate a support plate from a substrate, the substrate treating device including the substrate holding device as a stage. SOLUTION: The substrate holding device 12 holds the substrate 1 stuck on a sticking body 4a formed having its outer edge portion projected from an outer edge of the substrate 1, and has an inner peripheral portion 12a and an outer peripheral portion 12b disposed at an outer periphery of the inner peripheral portion 12a and includes a temperature control means which controls the temperature of the inner peripheral portion 12a and the temperature of the outer peripheral portion 12b independently of each other. COPYRIGHT: (C)2009,JPO&INPIT |
