发明名称 |
PLASMA NITRIDING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA PROCESSING APPARATUS |
摘要 |
A nitriding process is performed at a process temperature of 500° C. or more by causing microwave-excited high-density plasma of a nitrogen-containing gas to act on silicon in the surface of a target object, inside a process container of a plasma processing apparatus. The plasma is generated by supplying microwaves into the process container from a planar antenna having a plurality of slots.
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申请公布号 |
US2009104787(A1) |
申请公布日期 |
2009.04.23 |
申请号 |
US20060917013 |
申请日期 |
2006.06.07 |
申请人 |
TOHOKU UNIVERSITY;TOKYO ELECTRON LIMITED |
发明人 |
OHMI TADAHIRO;TERAMOTO AKINOBU;HONDA MINORU;NAKANISHI TOSHIO |
分类号 |
H01L21/31;C23C16/34;G05B19/00 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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