发明名称 OPTICAL MATERIAL, OPTICAL ELEMENT, AND METHOD FOR MANUFACTURING SAME
摘要 An optical material which has a relative permeability different from 1 to light having a wavelength in, for example, the infrared region or shorter than the infrared region and which is stable in structure, and a liquid and a solid (optical element) using the optical material. The optical material is a powder used as a component of a liquid or solid to which an illuminating light is irradiated, and includes a large number of resonating elements which constitute the powder and each of which is formed of a conductor having a width approximately same as or smaller than a wavelength of the illumination light, and a protective film which is formed of a disc-shaped insulator, wherein an entire surface of each of the split-rind resonators is covered by the protective film.
申请公布号 US2016195640(A1) 申请公布日期 2016.07.07
申请号 US201615068030 申请日期 2016.03.11
申请人 NIKON CORPORATION 发明人 OWA Soichi;WATANABE Shunji;SUZUKI Junji;KIDO Kazuhiro;TOBA Hidemitsu
分类号 G02B1/00;G03F7/20;G03F7/32;G02B1/14 主分类号 G02B1/00
代理机构 代理人
主权项 1. A method for producing an optical material composed of a plurality of minute resonators each of which is formed of a conductor, and is covered by a protective film formed of an insulator or a semi-conductor, the method comprising: forming a sacrifice layer on a substrate; forming a first protective layer formed of the insulator or the semi-conductor on the sacrifice layer; forming a conductive layer formed of the conductor on the first protective layer; patterning the minute resonators in the conductive layer; forming a second protective layer formed of the insulator or the semi-conductor so as to cover the patterned minute resonators; and removing the sacrifice layer.
地址 Tokyo JP