| 发明名称 | Polymerized film forming method | ||
| 摘要 | A polymerized film forming method for forming a polymerized film on a target surface of a workpiece using a first raw material gas which contains a first monomer and a second raw material gas which contains a second monomer differing from the first monomer includes: supplying the first raw material gas wherein difunctional non-aromatic amine having a hydrolyzable group is used for the first monomer; and supplying the second raw material gas wherein difunctional acid anhydride is used for the second monomer. | ||
| 申请公布号 | US9422452(B2) | 申请公布日期 | 2016.08.23 |
| 申请号 | US201514619375 | 申请日期 | 2015.02.11 |
| 申请人 | TOKYO ELECTRON LIMITED | 发明人 | Yamaguchi Tatsuya;Morisada Yoshinori |
| 分类号 | C23C16/455;C09D183/14;B05D1/34;B05D1/00;C08G77/54 | 主分类号 | C23C16/455 |
| 代理机构 | Nath, Goldberg & Meyer | 代理人 | Nath, Goldberg & Meyer ;Meyer Jerald L. |
| 主权项 | 1. A polymerized film forming method for forming a polymerized film on a target surface of a workpiece using a first raw material gas which contains a first monomer and a second raw material gas which contains a second monomer differing from the first monomer, the method comprising: supplying the first raw material gas wherein difunctional non-aromatic amine having a hydrolyzable group is used as the first monomer; and supplying the second raw material gas wherein difunctional acid anhydride is used as the second monomer, wherein the polymerized film is formed by repeating: (1) a reaction of dehydrating, condensing and polymerizing an amino group contained in the first monomer and acid anhydride contained in the second monomer;(2) a reaction of hydrolyzing the hydrolyzable group contained in the first monomer; and(3) a reaction of dehydrating, condensing and polymerizing the first monomer whose hydrolyzable group is hydrolyzed. | ||
| 地址 | Tokyo JP | ||